Silane coupling reagent (3-mercaptopropyl trimethoxysilane (MPTS)) was prepared on silicon substrate to form two-dimensional Self-Assembled Monolayer (SAM) and the terminal –SH group in the film was in situ oxidized to –SO3H group to endow the film with good chemisorption ability. Thus, lanthanum-based thin films were deposited on oxidized MPTS-SAM to form rare earth composite thin films (RE thin films), making use of the chemisorption ability of the –SO3H group. Atomic Force Microscope (AFM), X-ray Photoelectron Spectrometry (XPS), and contact angle measurements were used to characterize the RE thin films. Adhesive force and friction force of the RE thin films and silicon substrate were measured under various applied normal loads and scanning speed of AFM tip. The results showed that the friction force increased with applied normal loads and scanning speed of AFM tip. To study the effect of capillary force, tests were performed in various relative humidities. The results showed that the adhesive force of silicon substrate increased with relative humidity and the adhesive force of RE thin films only increased slightly with relative humidity. Research showed that surfaces with higher hydrophobic property reveal lowered adhesive and friction forces.